Customization: | Available |
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After-sales Service: | Free Lifetime After-Sales Service |
Warranty: | 1 Year |
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CUSTOMIZED FEATURES | |
Temperature | Max. 1400°C |
Power Supply | AC 380V, 15 kW |
Temperature Control Accuracy | ±1°C |
Furnace Tube Material | Outer tube: Recrystallized silicon carbide (D200×1900mm) Quartz tube: - Ends: Ø60mm - Middle: Ø180mm (L=1300mm) - Total length: 1950mm |
Heating Zone Length | 1300mm |
Control Zones | 3 independent PID-controlled zones |
Rotation System | Motorized, mechanical bearing drive |
Rotation Speed | 0-5 rpm (adjustable) |
Tilt Mechanism | Motorized tilt (0-20°) |
HMI | 10" touchscreen (Siemens PLC integrated) |
Programmable Features | Multi-segment temperature profiles, 2 gas lines, 1 vacuum line control |
Sealing System | Stainless steel flanges with magnetic fluid rotary feedthroughs (316L) |
Gas System | - 2 inlet lines (solenoid valves) - 1 exhaust line (solenoid valve) - 1 vacuum port |
Vacuum System | Two-stage rotary vane pump (2 L/s) |
Vacuum Measurement | Digital gauge (-100~100 kPa, supports micro-positive pressure) |
Compatible Process Gases | N2, Ar, O2, etc. |
Flow Control | 2 × Mass flow controllers (0-10 L/min) |
Temperature Uniformity | ±3°C (within heating zone) |
Max Temp | Operating Temp | Heating Element | Thermocouple | Tube Material |
1200℃ | 1150℃ | High-temperature alloy resistance wire or SiC | K type | SS/Quartz/Alumina |
1400℃ | 1350℃ | SiC | S type | High purity alumina |
1600℃ | 1550℃ | MoSi2 | B type | High purity alumina |
1700℃ | 1650℃ | MoSi2 | B type | High purity alumina |
1800℃ | 1750℃ | MoSi2 | B type | High purity alumina |
Customized | Upon request | W/ Graphite /Mo | B type/C type | W/ Graphite /Mo |